Since 1980s and 1990s, MEMS (Micro-Electro-Mechanical Systems) technology has developed rapidly. Various MEMS sensors, actuators and their micro / nano systems have been developed. They are small in size, light in weight and low in power consumption. They are not only used in the field of national defense, In the civilian area is also increasingly popular. Professor Guo Hang, Xiamen University Sam Benjamin Micronuclear Science and Technology Research Institute, has long been engaged in the research and development of MEMS and micro-energy technologies. In October 2017, the seminar on the application of the national piezoelectric and acoustic wave theory and devices held in Chengdu (SPAWDA 2017), master students Zhu Linhui, Ph.D. students Xu Mahui, Shen Jienan and Hao Rui attended the conference and made new research progress on MEMS piezoelectric accelerometers and vector microphones, as well as the application of microfluidic technology To prepare ultra-long ZnO nanowire material report, attention, and published five conference papers.
Micro-accelerometer is one of the most successful applications of MEMS technology. It is not only the core component of inertial navigation and guidance system, but also the automobile airbag detection is currently using MEMS accelerometer chip, its global market reached 1.5 billion in 2015 US dollars, and the annual growth rate of more than 13%, but the relevant technologies and markets dominated by the United States and Europe. With the continuous development of technology, micro-accelerometer toward the aerospace, industrial control testing and other fields, which requires micro-accelerometers not only have high sensitivity, but also have a wide dynamic range of work. MEMS piezoelectric micro-accelerometer is a small deformation caused by acceleration of the piezoelectric thin film material into a charge amount, through the collection of charge detection to determine changes in acceleration. Compared with the usual piezoresistive or capacitive micro-accelerometer, piezoelectric accelerometer high sensitivity, wide dynamic range and good linearity, but most of the piezoelectric accelerometer are manufactured by the traditional process, large volume , High energy consumption, low sensitivity and usually only uniaxial detection. MEMS piezoelectric micro-accelerometer involves many difficulties in the preparation of piezoelectric thin film material and the high degree of integration with microsensors in the structure and manufacturing process, and few domestic research units. Our research group has worked hard for many years to innovate. We have developed a piezoelectric micro-accelerometer based on MEMS technology. The development of piezoelectric materials has expanded from ZnO thin films to PZT thin films, from single cantilevers to new cross-beams and new "X" Micro-structural beams, from the development of single-axis test to the new d33 and d31 two modes of integration of the three-axis test, and is stepping up to micro-fabrication, and strive to make an early breakthrough.
Vector microphones are composed of a sound pressure sensor and a particle velocity sensor, and can measure the vector information in the sound field in time and space at the same time, including sound pressure gradient, particle velocity, acceleration, displacement, etc., and scalar information such as sound Pressure and so on, to make a comprehensive identification of the weapons in the battlefield by determining the nature, category and location of the sound source and is one of the indispensable core components in the anti-missile system. At present, the national strength of our country is constantly increasing. However, the security situation in the periphery is not optimistic. Sudden increases in emergencies and rising pressures have made the demand for high performance vector microphones with independent intellectual property rights more and more urgent. The international R & D in the Netherlands Lead, while domestic research on this area has also been carried out very little. The research group aimed at the needs of the country and focused on the further research. Zhu Linhui and Shen Jienan analyzed the traditional double-wire double-sensor microstructure SS type vector microphones. On this basis, the new three-wire sensor-heater-sensor The microstructure-based SHS-type vector microphones are discussed in depth. For the first time, an analytical model of SHS structure is established based on the flow field induced by acoustic flow, and three-dimensional numerical simulation is performed. The SHS-type vector microphones and the SS-type phase Has a smaller background noise than the basic design parameters of its microstructure and micro-manufacturing process, and laid a good foundation for further research and development in the future.
Figure 1 MEMS and micro-energy group Zhu Linhui, Shen Jienan, Xu May Hui, Hao Rui (left to right) and other four students to participate in the 2017 national piezoelectric and sound wave theory and device application seminar
Figure 2 Task Force members in the 2017 national piezoelectric and sound wave theory and device applications seminar report
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